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Fundamental Principles of Optical Lithography
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€63,33
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€76,00
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Nėra tokio varianto
Autorius Chris A. Mack, Chris Mack
Aprašymas
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
Fundamental Principles of Optical Lithography