MEMS

Discover the fascinating world of Microelectromechanical Systems (MEMS) in the comprehensive book MEMS by Mohamed Gad-el-Hak. Published by Taylor & Francis Inc in 2005, this hardback edition spans an impressive 664 pages, making it an essential resource for anyone interested in the design and construction of MEMS devices.

This informative volume delves into the techniques, technologies, and materials that are pivotal in the fabrication of MEMS. It provides a thorough overview of MEMS materials and explores various advanced manufacturing methods such as LIGA, macromolding, X-ray-based fabrication, EFAB^® technology, and deep reactive ion etching. Whether you're a student, researcher, or professional in electronics engineering, this book is a valuable addition to your library, offering insights into the cutting-edge field of microfabrication and nanotechnology.